Deposition and Microfabrication
EMSL offers deposition and microfabrication tools that can be used to tailor surfaces, atom by atom. With an emphasis on oxide mineral films and interfaces, users apply these tools to design and construct materials of various size distributions, ranging from high-quality, single-crystal thin films to nanostructures, with real-world applications. These materials are subsequently characterized and studied in detail using EMSL's mass spectrometry, microscopy, as well as spectroscopy and diffraction capabilities.
Additional Information
Capability Detail
- Growth of complex oxide films research – to synthesize oxides of interest, with a high degree of control, for their chemical, catalytic, electronic, and magnetic properties
- Geochemistry and biogeochemistry investigations – to prepare environmental interfaces such as stable oxides of iron that serve as substrates for heterogeneous surface organic, inorganic, and biochemical interactions
- Photochemistry studies – to prepare crystalline pure and doped oxide films to study the role of heterojunctions in photochemistry and photocatalysis
- Spintronics research – to construct magnetically doped transition metal oxides that exhibit ferromagnetism at and above room temperature and to determine the complex interrelationships between composition-structure and electronic-magnetic properties
- Microfabrication – to design and construct materials useful for chemical and biological sensing, to microfabricate components for optical microscopy applications, and to design and construct microfluidics systems
- Ion soft-landing – to prepare uniform films of high-purity materials using low-energy beams of mass-selected complex ions

Refer to the table below for a full listing, which leads to complete information about each of EMSL's deposition and microfabrication instruments. In brief, these instruments offer EMSL users the following capabilities:
- Unique oxygen plasma-assisted molecular beam epitaxy system designed in house
- Metalorganic chemical vapor deposition
- Ballistic deposition, spin coating, and wet chemical synthesis
- Ion beam synthesis and ion beam-assisted deposition
- Microfabrication equipment and clean-room capabilities.
All Related Publications Related Publications
- Bioreduction of hematite nanoparticles by the dissimilatory iron reducing bacterium Shewanella oneidensis MR-1.
- Fluorescent Dye Encapsulated ZnO Particles with Cell-specific Toxicity for Potential use in Biomedical Applications.
- The Oil-Water Interface: Mapping the Solvation Potential.
- Nanotechnology-Based Electrochemical Sensors for Biomonitoring Chemical Exposures .
- Highly Stable Trypsin-Aggregate Coatings on Polymer Nanofibers for Repeated Protein Digestion.
Related Research Highlights
- Microstructures of ZnO Films Deposited on (0001) and r-cut α-Al2O3 Using Metal Organic Chemical Vapor Deposition (Sapphires & Sunscreen)
- A Fast Analysis Technique to Evaluate Scintillation Response (Let There Be Light Yield)
- Experimental Studies of Heterogeneous Gas-to-Particle Reactions Using Novel Particle-on-Substrate Stagnation Flow Reactor Approach (What Are the Chances?)
- Conductivity of Oriented Samaria-Doped Ceria Thin Films Grown by Oxygen-Plasma-Assisted Molecular Beam Epitaxy (The Good Samaria)
Deposition and Microfabrication Capabilities Available at EMSL
To help with proposal planning, icons in the table below indicate instrument availability:
- 10 hours a day, 5 days a week
- 24 hours a day, 7 days a week

