Electron Spectrometer: Scanning Multiprobe Surface Analysis System - Versaprobe
Quick Specs
- Ultrahigh vacuum
- XPS capability
- UPS capability
- Sputter depth profiling capability
The SMSAS is a multi-technique surface analysis instrument based on elemental mapping using either scanning small spot X-rays or the electronics in the analyzer. This scanning technology provides high-performance micro-area spectroscopy, chemical imaging, and secondary electron imaging with high spatial resolution.
For X-ray photoelectron spectroscopy (XPS), this system will include a:
- Monochromatic, high-resolution Al X-ray source
- Non-monochromatic dual-anode X-ray source
- High-resolution hemispherical analyzer.
In addition, the system will include an intense He lamp for ultraviolet photoelectron spectroscopy (UPS), an argon ion gun for sputter depth profiling, and a C60 ion gun for high-resolution sputter depth profiling in organic and biological systems. This system will have an excellent dual beam charge neutralization method to provide effortless analysis of insulating samples using a combination of low energy ions and electrons. The system is equipped with an introduction chamber and a glove box for sample transfer under a controlled environment. In addition, EMSL staff will build a side chamber with limited processing capabilities and the existing transfer technology so that the portable transfer systems including vacuum suitcases can be attached to the main system through the side chamber.
| Physical Operating Criteria | Primary Performance Parameters |
|---|---|
| Operating Vacuum Conditions | ≤ 2x10-10 Torr |
| X-ray Sources |
|
| Spectrometer | High-resolution hemispherical analyzer |
| Capabilities |
|
| Specimen Exchange Capability |
|
| Data Acquisition/Analysis | PC-based Computer workstation interface |
