Mass Spectrometer: Time of Flight Secondary Ion (ToF SIMS) - 2007
- Ultrahigh vacuum
- C60 ion gun
- Liquid metal ion gun with Bin+ cluster sources
- Cs+/O2+ sputter ion gun
- 0-10,000 amu mass range
- Mass resolution >10000
- ~100 nm lateral resolution
- ~ 1 nm depth resolution
This ultrahigh vacuum surface analytical system is designed to examine surface structure, composition, and chemical state by means of secondary ion detection during ion sputtering. The instrument will be furnished with a C60 ion gun, a liquid metal ion gun with Bin+ sources, and a Cs+/O2+ sputter ion gun with emission current stabilizers. The capabilities include surface spectroscopy with high sensitivity and mass resolution, surface imaging with high lateral resolution, depth profiling with high depth resolution, and 3-D analysis. The ability to provide cluster ions, such as Bin+ and C60+, will enable EMSL users to obtain substantial improvements in detection yields, especially in biological materials. The C60 ion gun can provide ultimate high mass sensitivity, superior imaging, and a powerful organic sputter depth profiling capability with C60+ or C602+ ions.
This new instrumentation provides the user the flexibility to image with minimal shadowing on samples with high surface topography as well as the highest commercially available mass resolution performance. Low primary energy and low ion dose densities provide surface analysis without significantly altering of surface. The system is equipped with an introduction chamber and a glove box for sample transfer under controlled environment. In addition, EMSL staff are in the process of building a side chamber with limited processing capabilities and cryo-sample manipulation capability so that biological samples can be processed in the side chamber before the samples are transferred to the main system for SIMS analysis. This instrument will significantly improve EMSL's ability in areas such as microbial forensics, organic analysis, and biological imaging.
|Physical Operating Criteria||Primary Performance Parameters|
|Operating Vacuum Conditions||≤ 2x10-10 Torr|
|Ion Species, Energy Range|
|Spectrometer||ToF mass spectrometer, 0-10,000 amu mass range|
|Specimen Exchange Capability|
|Data Acquisition/Analysis||PC based Computer workstation interface|
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